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_aMicromechanics and nanoscale effects : _bMEMS, multi-scale materials and micro-flows / _cedited by Vasyl Michael Harik and Li-Shi Luo |
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_aDordrecht _aBoston _bKluwer Academic _c2004 |
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_axv, 240 p. _bil. _c25 cm. |
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_aICASE/LaRC interdisciplinary series in science and engineering _n10 |
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650 | 4 | _aMicroelectrónica | |
650 | 4 | _aSistemas microelectrónicos mecánicos | |
650 | 4 | _aActuadores | |
700 | 1 | _aHarik, Vasyl Michael | |
700 | 1 | _aLuo, Li-Shi | |
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