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Optical metrology

By: Material type: TextTextPublication details: West Sussex, England Hoboken, New Jersey John Wiley & Sons c2002Edition: 3rd edDescription: x, 360 p. il. 26 cmISBN:
  • 0470843004 (acid-free paper)
Subject(s): LOC classification:
  • QC 367 G37.2002
Online resources:
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