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Contamination-free manufacturing for semiconductors and other precision products / edited by Robert P. Donovan

Contributor(s): Material type: TextTextPublication details: New York Marcel Dekker c2001Description: x, 448 p. il. 24 cmISBN:
  • 0824703804
Subject(s): LOC classification:
  • TK 7871 85 C637 2001
Contents:
National technology roadmap for semiconductors : basis and alignment -- Off-Wafer measurement of contaminants -- On-Wafer measurement of particles -- On-Wafer measurement of molecular contaminants -- Transport and deposition of aerosol particles -- Particulate deposition in liquid systems -- Deposition of molecular contaminants in gaseous environments -- Organic contamination removal -- Deposition of metallic contaminants from liquids and their removal -- Sources of contamination and their control.
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Holdings
Item type Current library Collection Call number Status Date due Barcode
Préstamo Biblioteca Pedro Arrupe Acervo TK 7871 85 C637 2001 (Browse shelf(Opens below)) Available 071650

Incluye referencias bibliográficas e índice.

National technology roadmap for semiconductors : basis and alignment -- Off-Wafer measurement of contaminants -- On-Wafer measurement of particles -- On-Wafer measurement of molecular contaminants -- Transport and deposition of aerosol particles -- Particulate deposition in liquid systems -- Deposition of molecular contaminants in gaseous environments -- Organic contamination removal -- Deposition of metallic contaminants from liquids and their removal -- Sources of contamination and their control.

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